Until now, MOCVD fabs relied on subjective human tests to inspect the quality of wafer carriers after bakes and between runs. However, k-Space Associates, a supplier of thin-film characterization tools, introduced an ex situ tool that provides MOCVD fabs with essential wafer carrier characterization, including emissivity uniformity and defect identification.
The kSA Emissometer puts science back in carrier evaluation with high resolution carrier emissivity mapping and the detection of defects and microcracks that aren’t visible to the human eye. It provides full quantitative carrier maps in 10 minutes.
“The real advantage of the kSA Emissometer is that it provides fabs with systematic carrier data that can be integrated into their quality control processes. It also provides a go-no-go decision on carrier use and quantitative determination of the carrier emissivity, allowing for temperature set-point adjustments for individual carriers. In the end, this will lead to lower production costs and better device yields,” said k-Space CEO Darryl Barlett in a press release.