Until now, MOCVD fabs relied on subjective human tests to inspect the quality of wafer carriers after bakes and between runs. However, k-Space Associates, a supplier of thin-film characterization tools, introduced an ex situ tool that provides MOCVD fabs with essential wafer carrier characterization, including emissivity uniformity and defect identification.
The kSA Emissometer puts science back in carrier evaluation with high resolution carrier emissivity mapping and the detection of defects and microcracks that aren’t visible to the human eye. It provides full quantitative carrier maps in 10 minutes. [Read more…] about New Tool for MOCVD Carrier Characterization